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    Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

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    Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation_revised.pdf
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    Type
    Article
    Authors
    Ramini, Abdallah
    Bellaredj, Mohammed Lamine Faycal cc
    Hafiz, Md Abdullah Al cc
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2015-12-11
    Online Publication Date
    2015-12-11
    Print Publication Date
    2016-01-01
    Permanent link to this record
    http://hdl.handle.net/10754/596016
    
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    Abstract
    We present an experimental investigation for the nonlinear dynamic behaviors of clamped–clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.
    Citation
    Ramini, A., Bellaredj, M. L. F., Al Hafiz, M. A., & Younis, M. I. (2015). Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation. Journal of Micromechanics and Microengineering, 26(1), 015012. doi:10.1088/0960-1317/26/1/015012
    Publisher
    IOP Publishing
    Journal
    Journal of Micromechanics and Microengineering
    DOI
    10.1088/0960-1317/26/1/015012
    Additional Links
    http://http://iopscience.iop.org/article/10.1088/0960-1317/26/1/015012/meta
    ae974a485f413a2113503eed53cd6c53
    10.1088/0960-1317/26/1/015012
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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