Fractal Structures For Fixed Mems Capacitors

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Type
Patent
Patent Status
Granted Patent
Authors
Elshurafa, Amro M.
Radwan, Ahmed Gomaa Ahmed
Emira, Ahmed A.
Salama, Khaled N. cc
Assignee
King Abdullah University of Science and Technology
KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Physical Sciences and Engineering (PSE) Division
Date
2014-08-28
Submitted Date
2014-05-08
Permanent link to this record
http://hdl.handle.net/10754/595066

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Abstract
An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.
Patent Number
US9349786B2
Application Number
US 20140239446 A1
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Patents; Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division