Inkjet Printing With In Situ Fast Annealing For Patterned Multilayer Deposition
Type
PatentPatent Status
Published ApplicationDate
2013-12-05Submitted Date
2013-05-28Permanent link to this record
http://hdl.handle.net/10754/595007
Metadata
Show full item recordAbstract
Patterned multilayer films, such as those used in electronic devices, solar cells, solid oxide fuel cells (SOFCs), and solid oxide electrolysis cells (SOECs) may be deposited and annealed in a single tool. The tool includes an inkjet printer head, a heater, and a laser. The inkjet printer head deposits on a substrate either suspended particles of a functional material or solvated precursors of a functional material. The head is mounted on a support that allows the head to scan the substrate by moving along the support in a first direction and moving the support along a second direction. After the head deposits the material the heater evaporates solvent from substrate, and the depositing and heating may be repeated one or more times to form a patterned multilayer material. Then, a laser, microwave, and/or Joule effect heating device may be used to anneal the multilayer material to a desired pattern and crystalline state.Application Number
US 20130323434 A1Additional Links
http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220130323434%22.PGNR.&OS=DN/20130323434&RS=DN/20130323434http://assignment.uspto.gov/#/search?adv=publNum:20130323434
http://www.google.com/patents/US20130323434
http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=2013323434A1&KC=A1&FT=D