MEMS mass-spring-damper systems using an out-of-plane suspension scheme
| dc.contributor.author | Abdel Aziz, Ahmed Kamal Said | |
| dc.contributor.author | Sharaf, Abdel Hameed | |
| dc.contributor.author | Serry, Mohamed Yousef | |
| dc.contributor.author | Sedky, Sherif Salah | |
| dc.date.accessioned | 2016-01-24T10:41:12Z | |
| dc.date.available | 2016-01-24T10:41:12Z | |
| dc.date.issued | 2014-02-04 | |
| dc.date.submitted | 2010-05-27 | |
| dc.identifier.uri | http://hdl.handle.net/10754/594741 | |
| dc.description.abstract | MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed. | |
| dc.relation.url | http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8640541 | |
| dc.relation.url | http://assignment.uspto.gov/#/search?adv=patNum:8640541 | |
| dc.relation.url | http://www.google.com/patents/US8640541 | |
| dc.relation.url | http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=8640541B2&KC=B2&FT=D | |
| dc.title | MEMS mass-spring-damper systems using an out-of-plane suspension scheme | |
| dc.type | Patent | |
| dc.contributor.department | King Abdullah University of Science and Technology | |
| dc.description.status | Granted Patent | |
| dc.contributor.assignee | King Abdullah University of Science and Technology | |
| dc.description.country | United States | |
| dc.identifier.patentnumber | US 8640541 B2 | |
| dc.identifier.applicationnumber | US 20110030472 A1 | |
| dc.identifier.uspatentnumber | 8640541 | |
| refterms.dateFOA | 2018-06-13T11:50:52Z |
