Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode
KAUST DepartmentPhysical Sciences and Engineering (PSE) Division
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AbstractWe present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.
JournalVolume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Conference/Event nameASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference