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dc.contributor.authorIlyas, Saad
dc.contributor.authorRamini, Abdallah
dc.contributor.authorCarreno, Armando Arpys Arevalo
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2015-09-28T09:20:40Z
dc.date.available2015-09-28T09:20:40Z
dc.date.issued2015-01-12
dc.identifier.citationAn Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation 2015, 24 (4):1124 Journal of Microelectromechanical Systems
dc.identifier.issn1057-7157
dc.identifier.issn1941-0158
dc.identifier.doi10.1109/JMEMS.2014.2386285
dc.identifier.urihttp://hdl.handle.net/10754/578781
dc.description.abstractWe present an experimental and theoretical investigation of a micromachined mirror under a mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of polyimide as the main structural layer. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide range to study the dynamic responses. To simulate the behavior of the micromirror, it is modeled as a single degree of freedom system, where the parameters of the model are extracted experimentally. A good agreement is reported among the simulation results and the experimental data. These responses are studied under different frequencies and input voltages. The results show interesting dynamics, where the system exhibits primary resonance and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range.
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7006680
dc.rights(c) 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectMicro mirror
dc.subjectbandwidth
dc.subjectelectrostatic actuation
dc.subjectmixed-frequency excitation
dc.subjectmulti-frequency excitation
dc.subjectpolyimide
dc.subjectresonators
dc.titleAn Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation
dc.typeArticle
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalJournal of Microelectromechanical Systems
dc.eprint.versionPost-print
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personRamini, Abdallah
kaust.personYounis, Mohammad I.
kaust.personIlyas, Saad
kaust.personCarreno, Armando Arpys Arevalo
refterms.dateFOA2018-06-14T09:17:01Z
dc.date.published-online2015-01-12
dc.date.published-print2015-08


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