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    An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation

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    Mixed frequency excitation-KAUST-copy.pdf
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    Type
    Article
    Authors
    Ilyas, Saad cc
    Ramini, Abdallah
    Carreno, Armando Arpys Arevalo cc
    Younis, Mohammad I. cc
    KAUST Department
    Electrical Engineering Program
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2015-01-12
    Online Publication Date
    2015-01-12
    Print Publication Date
    2015-08
    Permanent link to this record
    http://hdl.handle.net/10754/578781
    
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    Abstract
    We present an experimental and theoretical investigation of a micromachined mirror under a mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of polyimide as the main structural layer. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide range to study the dynamic responses. To simulate the behavior of the micromirror, it is modeled as a single degree of freedom system, where the parameters of the model are extracted experimentally. A good agreement is reported among the simulation results and the experimental data. These responses are studied under different frequencies and input voltages. The results show interesting dynamics, where the system exhibits primary resonance and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range.
    Citation
    An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation 2015, 24 (4):1124 Journal of Microelectromechanical Systems
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    Journal of Microelectromechanical Systems
    DOI
    10.1109/JMEMS.2014.2386285
    Additional Links
    http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7006680
    ae974a485f413a2113503eed53cd6c53
    10.1109/JMEMS.2014.2386285
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Mechanical Engineering Program

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