Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator
AuthorsCarreno, Armando Arpys Arevalo
Conchouso Gonzalez, David
Younis, Mohammad I.
Foulds, Ian G.
KAUST DepartmentPhysical Sciences and Engineering (PSE) Division
Mechanical Engineering Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
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AbstractIn this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.
Conference/Event name10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015