Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications
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AbstractThis paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used, the bimorph actuators can be designed to move in both: Counter Clockwise (CCW) and Clockwise (CW) directions with a resolution of up to 110 μm/V, with smallest step in the range of nanometers. Thermal and electrical characterization of the thermal bimorph actuators showed low influence in the platforms temperature and low power consumption (< 35μW) mainly due to the natural isolation of the structure. Tip displacements larger than 500μm were achieved. The precise angle adjustment achieved through these mechanisms makes them optimal for a range of different MEMS applications, like optical benches and low frequency sweeping sensors and antennas. © 2015 IEEE.
Conference/Event name10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015