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dc.contributor.authorCarreno, Armando Arpys Arevalo
dc.contributor.authorByas, E.
dc.contributor.authorConchouso Gonzalez, David
dc.contributor.authorCastro, David
dc.contributor.authorIlyas, Saad
dc.contributor.authorFoulds, Ian G.
dc.date.accessioned2015-09-10T14:18:07Z
dc.date.available2015-09-10T14:18:07Z
dc.date.issued2015-04
dc.identifier.citationArevalo, A., Byas, E., Conchouso, D., Castro, D., Ilyas, S., & Foulds, I. G. (2015). A versatile multi-user polyimide surface micromachinning process for MEMS applications. 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. doi:10.1109/nems.2015.7147492
dc.identifier.doi10.1109/NEMS.2015.7147492
dc.identifier.urihttp://hdl.handle.net/10754/577100
dc.description.abstractThis paper reports a versatile multi-user micro-fabrication process for MEMS devices, the 'Polyimide MEMS Multi-User Process' (PiMMPs). The reported process uses polyimide as the structural material and three separate metallization layers that can be interconnected depending on the desired application. This process enables for the first time the development of out-of-plane compliant mechanisms that can be designed using six different physical principles for actuation and sensing on a wafer from a single fabrication run. These principles are electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception. © 2015 IEEE.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.titleA versatile multi-user polyimide surface micromachinning process for MEMS applications
dc.typeConference Paper
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentMechanical Engineering Program
dc.identifier.journal10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
dc.conference.date7 April 2015 through 11 April 2015
dc.conference.name10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
dc.contributor.institutionUniversity of British Columbia (UBC), Kelenowa, Canada
kaust.personIlyas, Saad
kaust.personFoulds, Ian G.
kaust.personCarreno, Armando Arpys Arevalo
kaust.personByas, E.
kaust.personConchouso Gonzalez, David
kaust.personCastro, David


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