Low pull-in voltage electrostatic MEMS switch using liquid dielectric
KAUST DepartmentElectrical Engineering Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Sensing, Magnetism and Microsystems Lab
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AbstractIn this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
Conference/Event name2014 IEEE 57th International Midwest Symposium on Circuits and Systems, MWSCAS 2014