Analytical solutions of the electrostatically actuated curled beam problem
Type
Conference PaperAuthors
Younis, Mohammad I.
Date
2014-07-24Online Publication Date
2014-07-24Print Publication Date
2015-08Permanent link to this record
http://hdl.handle.net/10754/564962
Metadata
Show full item recordAbstract
This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximation. In such cases, multi-mode reduced order models are shown to yield accurate results. © 2014 Springer-Verlag Berlin Heidelberg.Citation
Younis, M. I. (2014). Analytical expressions for the electrostatically actuated curled beam problem. Microsystem Technologies, 21(8), 1709–1717. doi:10.1007/s00542-014-2264-yPublisher
Springer NatureJournal
Microsystem TechnologiesConference/Event name
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014ISBN
9781482258271ae974a485f413a2113503eed53cd6c53
10.1007/s00542-014-2264-y