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    Analytical solutions of the electrostatically actuated curled beam problem

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    Type
    Conference Paper
    Authors
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2014-07-24
    Online Publication Date
    2014-07-24
    Print Publication Date
    2015-08
    Permanent link to this record
    http://hdl.handle.net/10754/564962
    
    Metadata
    Show full item record
    Abstract
    This works presents analytical expressions of the electrostatically actuated initially deformed cantilever beam problem. The formulation is based on the continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns. For largely deformed beams, we found that these formulas yield less accurate results due to the limitations of the single-mode approximation. In such cases, multi-mode reduced order models are shown to yield accurate results. © 2014 Springer-Verlag Berlin Heidelberg.
    Citation
    Younis, M. I. (2014). Analytical expressions for the electrostatically actuated curled beam problem. Microsystem Technologies, 21(8), 1709–1717. doi:10.1007/s00542-014-2264-y
    Publisher
    Springer Nature
    Journal
    Microsystem Technologies
    Conference/Event name
    Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
    ISBN
    9781482258271
    DOI
    10.1007/s00542-014-2264-y
    ae974a485f413a2113503eed53cd6c53
    10.1007/s00542-014-2264-y
    Scopus Count
    Collections
    Conference Papers; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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