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    Nonlinear dynamics of an electrically actuated mems device: Experimental and theoretical investigation

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    Type
    Conference Paper
    Authors
    Ruzziconi, Laura
    Ramini, Abdallah H.
    Younis, Mohammad I. cc
    Lenci, Stefano
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2014-04-02
    Online Publication Date
    2014-04-02
    Print Publication Date
    2013-11-15
    Permanent link to this record
    http://hdl.handle.net/10754/564818
    
    Metadata
    Show full item record
    Abstract
    This study deals with an experimental and theoretical investigation of an electrically actuated micro-electromechanical system (MEMS). The experimental nonlinear dynamics are explored via frequency sweeps in a neighborhood of the first symmetric natural frequency, at increasing values of electrodynamic excitation. Both the non-resonant branch, the resonant one, the jump between them, and the presence of a range of inevitable escape (dynamic pull-in) are observed. To simulate the experimental behavior, a single degree-offreedom spring mass model is derived, which is based on the information coming from the experimentation. Despite the apparent simplicity, the model is able to catch all the most relevant aspects of the device response. This occurs not only at low values of electrodynamic excitation, but also at higher ones. Nevertheless, the theoretical predictions are not completely fulfilled in some aspects. In particular, the range of existence of each attractor is smaller in practice than in the simulations. This is because, under realistic conditions, disturbances are inevitably encountered (e.g. discontinuous steps when performing the sweeping, approximations in the modeling, etc.) and give uncertainties to the operating initial conditions. A reliable prediction of the actual (and not only theoretical) response is essential in applications. To take disturbances into account, we develop a dynamical integrity analysis. Integrity profiles and integrity charts are performed. They are able to detect the parameter range where each branch can be reliably observed in practice and where, instead, becomes vulnerable. Moreover, depending on the magnitude of the expected disturbances, the integrity charts can serve as a design guideline, in order to effectively operate the device in safe condition, according to the desired outcome. Copyright © 2013 by ASME.
    Citation
    Ruzziconi, L., Ramini, A. H., Younis, M. I., & Lenci, S. (2013). Nonlinear Dynamics of an Electrically Actuated MEMS Device: Experimental and Theoretical Investigation. Volume 4A: Dynamics, Vibration and Control. doi:10.1115/imece2013-63627
    Publisher
    ASME International
    Journal
    Volume 4A: Dynamics, Vibration and Control
    Conference/Event name
    ASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013
    ISBN
    9780791856246
    DOI
    10.1115/IMECE2013-63627
    ae974a485f413a2113503eed53cd6c53
    10.1115/IMECE2013-63627
    Scopus Count
    Collections
    Conference Papers; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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