Investigation of a delayed feedback controller of MEMS resonators

Conference Paper

Masri, Karim M.
Younis, Mohammad I.
Shao, Shuai

KAUST Department
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division

Online Publication Date

Print Publication Date


Controlling mechanical systems is an important branch of mechanical engineering. Several techniques have been used to control Microelectromechanical systems (MEMS) resonators. In this paper, we study the effect of a delayed feedback controller on stabilizing MEMS resonators. A delayed feedback velocity controller is implemented through modifying the parallel plate electrostatic force used to excite the resonator into motion. A nonlinear single degree of freedom model is used to simulate the resonator response. Long time integration is used first. Then, a finite deference technique to capture periodic motion combined with the Floquet theory is used to capture the stable and unstable periodic responses. We show that applying a suitable positive gain can stabilize the MEMS resonator near or inside the instability dynamic pull in band. We also study the stability of the resonator by tracking its basins of attraction while sweeping the controller gain and the frequency of excitations. For positive delayed gains, we notice significant enhancement in the safe area of the basins of attraction. Copyright © 2013 by ASME.

Masri, K. M., Younis, M. I., & Shao, S. (2013). Investigation of a Delayed Feedback Controller of MEMS Resonators. Volume 7B: 9th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. doi:10.1115/detc2013-12045

ASME International

Volume 7B: 9th International Conference on Multibody Systems, Nonlinear Dynamics, and Control

Conference/Event Name
ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2013


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