Nonlinear dynamic response of an electrically actuated imperfect microbeam resonator

Type
Conference Paper

Authors
Ruzziconi, Laura
Bataineh, Ahmad M.
Younis, Mohammad I.
Cui, Weili
Lenci, Stefano

KAUST Department
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division

Online Publication Date
2014-02-12

Print Publication Date
2013-08-04

Date
2014-02-12

Abstract
We present a study of the dynamic behavior of a MEMS device constituted of an imperfect clamped-clamped microbeam subjected to electrostatic and electrodynamic actuation. Our objective is to develop a theoretical analysis, which is able to describe and predict all the main relevant aspects of the experimental response. Extensive experimental investigation is conducted, where the main imperfections coming from microfabrication are detected and the nonlinear dynamics are explored at increasing values of electrodynamic excitation, in a neighborhood of the first symmetric resonance. The nonlinear behavior is highlighted, which includes ranges of multistability, where the non-resonant and the resonant branch coexist, and intervals where superharmonic resonances are clearly visible. Numerical simulations are performed. Initially, two single mode reduced-order models are considered. One is generated via the Galerkin technique, and the other one via the combined use of the Ritz method and the Padé approximation. Both of them are able to provide a satisfactory agreement with the experimental data. This occurs not only at low values of electrodynamic excitation, but also at higher ones. Their computational efficiency is discussed in detail, since this is an essential aspect for systematic local and global simulations. Finally, the theoretical analysis is further improved and a two-degree-of-freedom reduced-order model is developed, which is capable also to capture the measured second symmetric superharmonic resonance. Despite the apparent simplicity, it is shown that all the proposed reduced-order models are able to describe the experimental complex nonlinear dynamics of the device accurately and properly, which validates the proposed theoretical approach. Copyright © 2013 by ASME.

Citation
Ruzziconi, L., Bataineh, A. M., Younis, M. I., Cui, W., & Lenci, S. (2013). Nonlinear Dynamic Response of an Electrically Actuated Imperfect Microbeam Resonator. Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems. doi:10.1115/detc2013-12240

Publisher
ASME International

Journal
Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems

Conference/Event Name
ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2013

DOI
10.1115/DETC2013-12240

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