Direct measurement of graphene contact resistivity to pre-deposited metal in buried contact test structure
Type
Conference PaperKAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionIntegrated Nanotechnology Lab
Electrical Engineering Program
Date
2013-08Permanent link to this record
http://hdl.handle.net/10754/564786
Metadata
Show full item recordAbstract
We demonstrate a buried contact based novel test structure for direct contact resistivity measurement of graphene-metal interfaces. We also observe excellent contact resistivity 1 μO-cm2 without any additional surface modification suggesting that the intrinsic Au-graphene contact is sufficient for achieving devices with low contact resistance. The chemical mechanical polishing less test structure and data described herein highlights an ideal methodology for systematic screening and engineering of graphene-metal contact resistivity to enable low power high speed carbon electronics. © 2013 IEEE.Citation
Qaisi, R. M., Smith, C. E., Ghoneim, M. T., Yu, Q., & Hussain, M. M. (2013). Direct measurement of graphene contact resistivity to pre-deposited metal in buried contact test structure. 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013). doi:10.1109/nano.2013.6720966Conference/Event name
2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013ISBN
9781479906758ae974a485f413a2113503eed53cd6c53
10.1109/NANO.2013.6720966