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dc.contributor.authorSevilla, Galo T.
dc.contributor.authorRojas, Jhonathan Prieto
dc.contributor.authorAhmed, Sally
dc.contributor.authorHussain, Aftab M.
dc.contributor.authorInayat, Salman Bin
dc.contributor.authorHussain, Muhammad Mustafa
dc.date.accessioned2015-08-04T07:14:44Z
dc.date.available2015-08-04T07:14:44Z
dc.date.issued2013-06
dc.identifier.isbn9781467359818
dc.identifier.doi10.1109/Transducers.2013.6627347
dc.identifier.urihttp://hdl.handle.net/10754/564752
dc.description.abstractThis paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.subjectflexible electronics
dc.subjecthigh performance flexible devices
dc.subjectlithium-ion battery
dc.subjectMetal-Oxide-Semiconductor
dc.subjectmicro-thermoelectric generators
dc.titleSilicon fabric for multi-functional applications
dc.typeConference Paper
dc.contributor.departmentIntegrated Nanotechnology Lab
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.identifier.journal2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
dc.conference.date16 June 2013 through 20 June 2013
dc.conference.name2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
dc.conference.locationBarcelona
kaust.personSevilla, Galo T.
kaust.personRojas, Jhonathan Prieto
kaust.personAhmed, Sally
kaust.personHussain, Aftab M.
kaust.personInayat, Salman Bin
kaust.personHussain, Muhammad Mustafa


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