Type
Conference PaperAuthors
Sevilla, Galo T.
Rojas, Jhonathan Prieto

Ahmed, Sally
Hussain, Aftab M.

Inayat, Salman Bin
Hussain, Muhammad Mustafa

KAUST Department
Integrated Nanotechnology LabComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Date
2013-06Permanent link to this record
http://hdl.handle.net/10754/564752
Metadata
Show full item recordAbstract
This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.Conference/Event name
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013ISBN
9781467359818ae974a485f413a2113503eed53cd6c53
10.1109/Transducers.2013.6627347