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    Amorphous metal based nanoelectromechanical switch

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    Type
    Conference Paper
    Authors
    Mayet, Abdulilah M. cc
    Smith, Casey
    Hussain, Muhammad Mustafa cc
    KAUST Department
    Electrical Engineering Program
    Integrated Nanotechnology Lab
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Date
    2013-04
    Permanent link to this record
    http://hdl.handle.net/10754/564694
    
    Metadata
    Show full item record
    Abstract
    Nanoelectromechanical (NEM) switch is an interesting ultra-low power option which can operate in the harsh environment and can be a complementary element in complex digital circuitry. Although significant advancement is happening in this field, report on ultra-low voltage (pull-in) switch which offers high switching speed and area efficiency is yet to be made. One key challenge to achieve such characteristics is to fabricate nano-scale switches with amorphous metal so the shape and dimensional integrity are maintained to achieve the desired performance. Therefore, we report a tungsten alloy based amorphous metal with fabrication process development of laterally actuated dual gated NEM switches with 100 nm width and 200 nm air-gap to result in <5 volts of actuation voltage (Vpull-in). © 2013 IEEE.
    Citation
    Mayet, A., Smith, C., & Hussain, M. M. (2013). Amorphous metal based nanoelectromechanical switch. 2013 Saudi International Electronics, Communications and Photonics Conference. doi:10.1109/siecpc.2013.6550765
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    2013 Saudi International Electronics, Communications and Photonics Conference
    Conference/Event name
    2013 Saudi International Electronics, Communications and Photonics Conference, SIECPC 2013
    ISBN
    9781467361958
    DOI
    10.1109/SIECPC.2013.6550765
    ae974a485f413a2113503eed53cd6c53
    10.1109/SIECPC.2013.6550765
    Scopus Count
    Collections
    Conference Papers; Electrical and Computer Engineering Program; Integrated Nanotechnology Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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