Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester
KAUST DepartmentImaging and Characterization Core Lab
Advanced Nanofabrication, Imaging and Characterization Core Lab
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AbstractThis paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. © 2013 IEEE.
Conference/Event nameIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013