Room temperature inductively coupled plasma etching of InAs/InSb in BCl 3/Cl 2/Ar
Type
Conference PaperAuthors
Sun, JianKosel, Jürgen
KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Physical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab