Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off
Type
ArticleAuthors
Yue, WeishengWang, Zhihong
Wang, Xianbin
Chen, Longqing
Yang, Yang
Siang, Basil Chew Joo
Syed, Ahad A.
Wong, Ka Chun
Zhang, Xixiang

KAUST Department
Advanced Nanofabrication, Imaging and Characterization Core LabComputer Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Core Labs
Imaging and Characterization Core Lab
Material Science and Engineering Program
Physical Science and Engineering (PSE) Division
Date
2012-01-01Permanent link to this record
http://hdl.handle.net/10754/564519
Metadata
Show full item recordAbstract
A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.Publisher
American Scientific PublishersPubMed ID
22524042ae974a485f413a2113503eed53cd6c53
10.1166/jnn.2012.5382
Scopus Count
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