Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

Yue, Weisheng; Wang, Zhihong; Wang, Xianbin; Chen, Longqing; Yang, Yang; Siang, Basil Chew Joo; Syed, Ahad A.; Wong, Ka Chun; Zhang, Xixiang

Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

Type

Article

Authors

Yue, Weisheng
Wang, Zhihong
Wang, Xianbin
Chen, Longqing
Yang, Yang
Siang, Basil Chew Joo
Syed, Ahad A.
Wong, Ka Chun
Zhang, Xixiang

KAUST Department

Advanced Nanofabrication, Imaging and Characterization Core Lab
Computer Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Core Labs
Imaging and Characterization Core Lab
Material Science and Engineering Program
Physical Science and Engineering (PSE) Division

Date

2012-01-01

Abstract

A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.

Citation

Yue, W., Wang, Z., Wang, X., Chen, L., Yang, Y., Chew, B., … Zhang, X. (2012). Fabrication of Metallic Nanostructures of Sub-20 nm with an Optimized Process of E-Beam Lithography and Lift-Off. Journal of Nanoscience and Nanotechnology, 12(1), 696–699. doi:10.1166/jnn.2012.5382