Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off
Syed, Ahad A.
Wong, Ka Chun
KAUST DepartmentImaging and Characterization Core Lab
Physical Sciences and Engineering (PSE) Division
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Computer Science Program
Advanced Nanofabrication, Imaging and Characterization Core Lab
Materials Science and Engineering Program
MetadataShow full item record
AbstractA process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.
PublisherAmerican Scientific Publishers
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