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    Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

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    Type
    Article
    Authors
    Yue, Weisheng
    Wang, Zhihong
    Wang, Xianbin
    Chen, Longqing
    Yang, Yang
    Siang, Basil Chew Joo
    Syed, Ahad A.
    Wong, Ka Chun
    Zhang, Xixiang cc
    KAUST Department
    Advanced Nanofabrication, Imaging and Characterization Core Lab
    Computer Science Program
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Core Labs
    Imaging and Characterization Core Lab
    Material Science and Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2012-01-01
    Permanent link to this record
    http://hdl.handle.net/10754/564519
    
    Metadata
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    Abstract
    A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.
    Publisher
    American Scientific Publishers
    Journal
    Journal of Nanoscience and Nanotechnology
    DOI
    10.1166/jnn.2012.5382
    PubMed ID
    22524042
    ae974a485f413a2113503eed53cd6c53
    10.1166/jnn.2012.5382
    Scopus Count
    Collections
    Articles; Imaging and Characterization Core Lab; Physical Science and Engineering (PSE) Division; Computer Science Program; Material Science and Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

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