Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off
Type
ArticleAuthors
Yue, WeishengWang, Zhihong
Wang, Xianbin
Chen, Longqing
Yang, Yang
Siang, Basil Chew Joo
Syed, Ahad A.
Wong, Ka Chun
Zhang, Xixiang
KAUST Department
Advanced Nanofabrication, Imaging and Characterization Core LabComputer Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Core Labs
Imaging and Characterization Core Lab
Material Science and Engineering Program
Physical Science and Engineering (PSE) Division