San Roman Alerigi, Damian
Cha, Dong Kyu
Ooi, Boon S.
Ng, Tien Khee
KAUST DepartmentAdvanced Nanofabrication, Imaging and Characterization Core Lab
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Imaging and Characterization Core Lab
Physical Science and Engineering (PSE) Division
Permanent link to this recordhttp://hdl.handle.net/10754/564460
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AbstractWe compare the sharpness of tungsten probe tips produced by the single-step and two-step dynamic electrochemical etching processes. A small radius of curvature (RoC) of 25 nm or less was routinely obtained when the two-step electrochemical etching (TEE) process was adopted, while the smallest achievable RoC was ∼10 nm, rendering it suitable for atomic force microscopy (AFM) or scanning tunneling microscopy (STM) applications. © 2011 IEEE.
CitationAl-Falih, H., Yasser Khan, Yaping Zhang, Damain Pablo San-Roman-Alerigi, Cha, D., Boon Siew Ooi, & Ng, T. K. (2011). Fabrication of tuning-fork based AFM and STM tungsten probe. 8th International Conference on High-Capacity Optical Networks and Emerging Technologies. doi:10.1109/honet.2011.6149815
Conference/Event name8th International Conference on High-Capacity Optical Networks and Emerging Technologies, HONET 2011