Ultra-high resolution optical coherence tomography for encapsulation quality inspection
Fabritius, Tapio E J
Ulański, Jacek P.
Myllylä̈, Risto Antero
Jabbour, Ghassan E.
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AbstractWe present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1-3 μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti: sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Submicron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection. © Springer-Verlag 2011.
SponsorsPresented study was done within PolyNet project and has been funded from the European Community's Seventh Framework Programme (FP7/2007-2013) under the grant agreement No. 214006. In addition, the authors would like to thank the Academy of Finland for the support in their research on UHR-OCT.
JournalApplied Physics B