Ultra-high resolution optical coherence tomography for encapsulation quality inspection
Type
ArticleAuthors
Czajkowski, JakubFabritius, Tapio E J
Ulański, Jacek P.
Marszałek, Tomasz
Gazicki-Lipman, Maciej
Nosal, Andrzej
Śliz, Rafal
Alarousu, Erkki
Prykäri, Tuukka
Myllylä̈, Risto Antero
Jabbour, Ghassan E.
Date
2011-08-28Online Publication Date
2011-08-28Print Publication Date
2011-11Permanent link to this record
http://hdl.handle.net/10754/564419
Metadata
Show full item recordAbstract
We present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1-3 μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti: sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Submicron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection. © Springer-Verlag 2011.Citation
Czajkowski, J., Fabritius, T., Ulański, J., Marszałek, T., Gazicki-Lipman, M., Nosal, A., … Jabbour, G. (2011). Ultra-high resolution optical coherence tomography for encapsulation quality inspection. Applied Physics B, 105(3), 649–657. doi:10.1007/s00340-011-4699-5Sponsors
Presented study was done within PolyNet project and has been funded from the European Community's Seventh Framework Programme (FP7/2007-2013) under the grant agreement No. 214006. In addition, the authors would like to thank the Academy of Finland for the support in their research on UHR-OCT.Publisher
Springer NatureJournal
Applied Physics Bae974a485f413a2113503eed53cd6c53
10.1007/s00340-011-4699-5