Multi states electromechanical switch for energy efficient parallel data processing
KAUST DepartmentElectrical Engineering Program
Integrated Nanotechnology Lab
Physical Sciences and Engineering (PSE) Division
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
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AbstractWe present a design, simulation results and fabrication of electromechanical switches enabling parallel data processing and multi functionality. The device is applied in logic gates AND, NOR, XNOR, and Flip-Flops. The device footprint size is 2μm by 0.5μm, and has a pull-in voltage of 5.15V which is verified by FEM simulation. © 2011 IEEE.
Conference/Event nameSaudi International Electronics, Communications and Photonics Conference 2011, SIECPC 2011