Development of untethered SU-8 polymer scratch drive microrobots

Valencia Garcia, Manuel; Atallah, Tarek Nabil; Castro, David; Conchouso Gonzalez, David; Al Dosari, Mishari Ibraheem; Hammad, Rafat; Al Rawashdeh, Ehab Jamal; Zaher, Amir Omar; Kosel, Jürgen; Foulds, Ian G.

Development of untethered SU-8 polymer scratch drive microrobots

Type

Conference Paper

Authors

Valencia Garcia, Manuel
Atallah, Tarek Nabil
Castro, David

Conchouso Gonzalez, David

Al Dosari, Mishari Ibraheem
Hammad, Rafat
Al Rawashdeh, Ehab Jamal
Zaher, Amir Omar
Kosel, Jürgen

Foulds, Ian G.

KAUST Department

Computational Bioscience Research Center (CBRC)
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab

Date

2011-01

Abstract

This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA's plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.

Citation

Valencia, M., Atallah, T., Castro, D., Conchouso, D., Dosari, M., Hammad, R., … Foulds, I. G. (2011). Development of untethered SU-8 polymer scratch drive microrobots. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems. doi:10.1109/memsys.2011.5734652