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    Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder

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    Type
    Article
    Authors
    Al Rowais, Hommood
    Li, Bodong cc
    Liang, Cai cc
    Green, Scott Ryan
    Gianchandani, Yogesh B.
    Kosel, Jürgen cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Sensing, Magnetism and Microsystems Lab
    Date
    2011-04-06
    Online Publication Date
    2011-04-06
    Print Publication Date
    2011-04
    Permanent link to this record
    http://hdl.handle.net/10754/564327
    
    Metadata
    Show full item record
    Abstract
    This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.
    Citation
    Al Rowais, H., Li, B., Liang, C., Green, S., Gianchandani, Y., & Kosel, J. (2011). Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder. Journal of Applied Physics, 109(7), 07E524. doi:10.1063/1.3562041
    Sponsors
    This work was performed in part at the Lurie Nanofabrication Facility at the University of Michigan, a member of the National Nanotechnology Infrastructure Network, which is supported in part by the National Science Foundation.
    Publisher
    AIP Publishing
    Journal
    Journal of Applied Physics
    DOI
    10.1063/1.3562041
    ae974a485f413a2113503eed53cd6c53
    10.1063/1.3562041
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Mechanical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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