Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder
Type
ArticleAuthors
Al Rowais, HommoodLi, Bodong

Liang, Cai

Green, Scott Ryan
Gianchandani, Yogesh B.
Kosel, Jürgen

KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab
Date
2011-04-06Online Publication Date
2011-04-06Print Publication Date
2011-04Permanent link to this record
http://hdl.handle.net/10754/564327
Metadata
Show full item recordAbstract
This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.Citation
Al Rowais, H., Li, B., Liang, C., Green, S., Gianchandani, Y., & Kosel, J. (2011). Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder. Journal of Applied Physics, 109(7), 07E524. doi:10.1063/1.3562041Sponsors
This work was performed in part at the Lurie Nanofabrication Facility at the University of Michigan, a member of the National Nanotechnology Infrastructure Network, which is supported in part by the National Science Foundation.Publisher
AIP PublishingJournal
Journal of Applied Physicsae974a485f413a2113503eed53cd6c53
10.1063/1.3562041