Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder
AuthorsAl Rowais, Hommood
Green, Scott Ryan
Gianchandani, Yogesh B.
KAUST DepartmentPhysical Sciences and Engineering (PSE) Division
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Sensing, Magnetism and Microsystems Lab
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AbstractThis paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.
SponsorsThis work was performed in part at the Lurie Nanofabrication Facility at the University of Michigan, a member of the National Nanotechnology Infrastructure Network, which is supported in part by the National Science Foundation.
JournalJournal of Applied Physics