Structural and morphological properties of HfxZr 1-xO2 thin films prepared by Pechini route
AuthorsGarcía-Cerda, L. A.
Puente-Urbina, B. A.
Quevedo-López, Manuel Angel Quevedo
Gnade, Bruce E.
Baldenegro-Pérez, Leonardo Aurelio
Alshareef, Husam N.
Hernández-Landaverde, Martín Adelaido
KAUST DepartmentMaterials Science and Engineering Program
Physical Sciences and Engineering (PSE) Division
Functional Nanomaterials and Devices Research Group
MetadataShow full item record
AbstractIn this study, HfxZr1-xO2 (0 < x < 1) thin films were deposited on silicon wafers using a dip-coating technique and by using a precursor solution prepared by the Pechini route. The effects of annealing temperature on the structure and morphological properties of the proposed films were investigated. HfxZr1-xO2 thin films with 1, 3 and 5 layers were annealed in air for 2 h at 600 and 800 °C and the structural and morphological properties studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). XRD results show that the films have monoclinic and tetragonal structure depending of the Hf and Zr concentration. SEM photographs show that all films consist of nanocrystalline grains with sizes in the range of 6 - 13 nm. The total film thickness is about 90 nm. © (2010) Trans Tech Publications.
PublisherTrans Tech Publications
JournalMaterials Science Forum
Conference/Event name1st Joint Advanced Electron Microscopy School for Nanomaterials and the Workshop on Nanomaterials, AEM-NANOMAT'09