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    AlGaN-based deep-ultraviolet light-emitting diodes grown on high-quality AlN template using MOVPE

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    Type
    Article
    Authors
    Yan, Jianchang
    Wang, Junxi
    Zhang, Yun
    Cong, Peipei
    Sun, Lili
    Tian, Yingdong
    Zhao, Chao cc
    Li, Jinmin
    KAUST Department
    Advanced Nanofabrication, Imaging and Characterization Core Lab
    Physical Characterization
    Date
    2015-03
    Permanent link to this record
    http://hdl.handle.net/10754/564088
    
    Metadata
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    Abstract
    In this article, we report the growth of high-quality AlN film using metal-organic vapor phase epitaxy. Three layers of middle-temperature (MT) AlN were introduced during the high-temperature (HT) AlN growth. During the MT-AlN layer growth, aluminum and nitrogen sources were closed for 6 seconds after every 5-nm MT-AlN, while H2 carrier gas was always on. The threading dislocation density in an AlN epi-layer on a sapphire substrate was reduced by almost half. AlGaN-based deep-ultraviolet light-emitting diodes were further fabricated based on the AlN/sapphire template. At 20 mA driving current, the emitted peak wavelength is 284.5 nm and the light output power exceeds 3 mW.
    Citation
    Yan, J., Wang, J., Zhang, Y., Cong, P., Sun, L., Tian, Y., … Li, J. (2015). AlGaN-based deep-ultraviolet light-emitting diodes grown on High-quality AlN template using MOVPE. Journal of Crystal Growth, 414, 254–257. doi:10.1016/j.jcrysgro.2014.10.015
    Sponsors
    This work was supported by the National Natural Sciences Foundation of China under Grant Nos. 61376047, 61376090, 61204053 and 51102226, by the National High Technology Program of China under Grant No. 2014AA032608 and 2011AA03A111, by the National Basic Research Program of China No. 2012CB619306, and the National 1000 Young Talents Program.
    Publisher
    Elsevier BV
    Journal
    Journal of Crystal Growth
    DOI
    10.1016/j.jcrysgro.2014.10.015
    ae974a485f413a2113503eed53cd6c53
    10.1016/j.jcrysgro.2014.10.015
    Scopus Count
    Collections
    Articles; Imaging and Characterization Core Lab

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