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    A surface acoustic wave passive and wireless sensor for magnetic fields, temperature, and humidity

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    Type
    Article
    Authors
    Li, Bodong cc
    Yassine, Omar cc
    Kosel, Jürgen cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Physical Science and Engineering (PSE) Division
    Sensing, Magnetism and Microsystems Lab
    Date
    2015-01
    Permanent link to this record
    http://hdl.handle.net/10754/563982
    
    Metadata
    Show full item record
    Abstract
    In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.
    Citation
    Li, B., Yassine, O., & Kosel, J. (2015). A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic Fields, Temperature, and Humidity. IEEE Sensors Journal, 15(1), 453–462. doi:10.1109/jsen.2014.2335058
    Sponsors
    This work was supported by the King Abdullah University of Science and Technology, Thuwal, Saudi Arabia.
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    IEEE Sensors Journal
    DOI
    10.1109/JSEN.2014.2335058
    ae974a485f413a2113503eed53cd6c53
    10.1109/JSEN.2014.2335058
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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