A surface acoustic wave passive and wireless sensor for magnetic fields, temperature, and humidity
Type
ArticleAuthors
Li, Bodong
Yassine, Omar

Kosel, Jürgen

KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Physical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab
Date
2015-01Permanent link to this record
http://hdl.handle.net/10754/563982
Metadata
Show full item recordAbstract
In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.Citation
Li, B., Yassine, O., & Kosel, J. (2015). A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic Fields, Temperature, and Humidity. IEEE Sensors Journal, 15(1), 453–462. doi:10.1109/jsen.2014.2335058Sponsors
This work was supported by the King Abdullah University of Science and Technology, Thuwal, Saudi Arabia.Journal
IEEE Sensors Journalae974a485f413a2113503eed53cd6c53
10.1109/JSEN.2014.2335058