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dc.contributor.authorFuentes-Fernandez, E. M A
dc.contributor.authorSalomon-Preciado, A. M.
dc.contributor.authorGnade, Bruce E.
dc.contributor.authorQuevedo-López, Manuel Angel Quevedo
dc.contributor.authorShah, Pradeep
dc.contributor.authorAlshareef, Husam N.
dc.date.accessioned2015-08-03T12:06:41Z
dc.date.available2015-08-03T12:06:41Z
dc.date.issued2014-08-07
dc.identifier.issn03615235
dc.identifier.doi10.1007/s11664-014-3308-x
dc.identifier.urihttp://hdl.handle.net/10754/563694
dc.description.abstractThe effect of a polycrystalline silicon (poly-Si) seeding layer on the properties of relaxor Pb(Zr0.53,Ti0.47)O3-Pb(Zn1/3,Nb2/3)O3 (PZT-PZN) thin films and energy-harvesting cantilevers was studied. We deposited thin films of the relaxor on two substrates, with and without a poly-Si seeding layer. The seeding layer, which also served as a sacrificial layer to facilitate cantilever release, was found to improve morphology, phase purity, crystal orientation, and electrical properties. We attributed these results to reduction of the number of nucleation sites and, therefore, to an increase in relaxor film grain size. The areal power density of the wet-based released harvester was measured. The power density output of the energy harvester with this relaxor composition and the poly-Si seeding layer was 325 μW/cm2.
dc.description.sponsorshipThe authors would like to thank the National Science Foundation for the Phase I STTR #0810391 and Phase IB #0937831 grants supplemented by the Texas Emerging Technology Fund seed grant (March 2008-Sept 2009). The research reported here was also supported by King Abdullah University of Science and Technology.
dc.publisherSpringer Nature
dc.subjectcantilever
dc.subjectEnergy harvesting
dc.subjectintegration
dc.subjectperovskite
dc.subjectpiezoelectric
dc.subjectrelaxor
dc.titleFabrication of relaxer-based piezoelectric energy harvesters using a sacrificial poly-Si seeding layer
dc.typeArticle
dc.contributor.departmentFunctional Nanomaterials and Devices Research Group
dc.contributor.departmentMaterial Science and Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalJournal of Electronic Materials
dc.contributor.institutionUniversity of Texas at Dallas, 800 W. Campbell RdRichardson, TX, United States
dc.contributor.institutionTexas Micro Power Inc., 7920 Beltline RdDallas, TX, United States
kaust.personAlshareef, Husam N.
dc.date.published-online2014-08-07
dc.date.published-print2014-11


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