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dc.contributor.authorLi, Huawei
dc.contributor.authorFan, Yiqiang
dc.contributor.authorConchouso Gonzalez, David
dc.contributor.authorFoulds, Ian G.
dc.date.accessioned2015-08-03T11:37:05Z
dc.date.available2015-08-03T11:37:05Z
dc.date.issued2013-12-21
dc.identifier.issn09467076
dc.identifier.doi10.1007/s00542-013-2031-5
dc.identifier.urihttp://hdl.handle.net/10754/563156
dc.description.abstractThis paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.
dc.publisherSpringer Nature
dc.titleSurface tension-induced PDMS micro-pillars with controllable tips and tilt angles
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectromechanical Microsystems & Polymer Integration Research Lab (EMPIRe)
dc.contributor.departmentElectrical Engineering Program
dc.identifier.journalMicrosystem Technologies
kaust.personLi, Huawei
kaust.personFan, Yiqiang
kaust.personFoulds, Ian G.
kaust.personConchouso Gonzalez, David
dc.date.published-online2013-12-21
dc.date.published-print2015-02


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