Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electromechanical Microsystems & Polymer Integration Research Lab (EMPIRe)
Electrical Engineering Program
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AbstractThis paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.