Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles
Type
ArticleKAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectromechanical Microsystems & Polymer Integration Research Lab (EMPIRe)
Electrical Engineering Program
Date
2013-12-21Online Publication Date
2013-12-21Print Publication Date
2015-02Permanent link to this record
http://hdl.handle.net/10754/563156
Metadata
Show full item recordAbstract
This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.Citation
Li, H., Fan, Y., Conchouso, D., & Foulds, I. G. (2013). Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles. Microsystem Technologies, 21(2), 445–449. doi:10.1007/s00542-013-2031-5Publisher
Springer NatureJournal
Microsystem Technologiesae974a485f413a2113503eed53cd6c53
10.1007/s00542-013-2031-5