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    Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles

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    Type
    Article
    Authors
    Li, Huawei
    Fan, Yiqiang
    Conchouso Gonzalez, David cc
    Foulds, Ian G.
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electromechanical Microsystems & Polymer Integration Research Lab (EMPIRe)
    Electrical Engineering Program
    Date
    2013-12-21
    Online Publication Date
    2013-12-21
    Print Publication Date
    2015-02
    Permanent link to this record
    http://hdl.handle.net/10754/563156
    
    Metadata
    Show full item record
    Abstract
    This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.
    Citation
    Li, H., Fan, Y., Conchouso, D., & Foulds, I. G. (2013). Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles. Microsystem Technologies, 21(2), 445–449. doi:10.1007/s00542-013-2031-5
    Publisher
    Springer Nature
    Journal
    Microsystem Technologies
    DOI
    10.1007/s00542-013-2031-5
    ae974a485f413a2113503eed53cd6c53
    10.1007/s00542-013-2031-5
    Scopus Count
    Collections
    Articles; Electrical and Computer Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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