Show simple item record

dc.contributor.authorPietroy, David
dc.contributor.authorGereige, Issam
dc.contributor.authorGourgon, Cécile
dc.date.accessioned2015-08-03T11:36:11Z
dc.date.available2015-08-03T11:36:11Z
dc.date.issued2013-12
dc.identifier.citationPietroy, D., Gereige, I., & Gourgon, C. (2013). Automatic detection of NIL defects using microscopy and image processing. Microelectronic Engineering, 112, 163–167. doi:10.1016/j.mee.2013.03.126
dc.identifier.issn01679317
dc.identifier.doi10.1016/j.mee.2013.03.126
dc.identifier.urihttp://hdl.handle.net/10754/563118
dc.description.abstractNanoimprint Lithography (NIL) is a promising technology for low cost and large scale nanostructure fabrication. This technique is based on a contact molding-demolding process, that can produce number of defects such as incomplete filling, negative patterns, sticking. In this paper, microscopic imaging combined to a specific processing algorithm is used to detect numerically defects in printed patterns. Results obtained for 1D and 2D imprinted gratings with different microscopic image magnifications are presented. Results are independent on the device which captures the image (optical, confocal or electron microscope). The use of numerical images allows the possibility to automate the detection and to compute a statistical analysis of defects. This method provides a fast analysis of printed gratings and could be used to monitor the production of such structures. © 2013 Elsevier B.V. All rights reserved.
dc.description.sponsorshipThis work is supported by the NaPANIL european project.
dc.publisherElsevier BV
dc.subjectDefects detection
dc.subjectImage processing
dc.subjectNanoimprint lithography
dc.titleAutomatic detection of NIL defects using microscopy and image processing
dc.typeArticle
dc.contributor.departmentKAUST Solar Center (KSC)
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalMicroelectronic Engineering
dc.contributor.institutionLaboratoire des Technologies de la Microélectronique (LTM), 17 rue des Martyrs, F-38 054 Grenoble Cedex 9, France
kaust.personGereige, Issam


This item appears in the following Collection(s)

Show simple item record