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dc.contributor.authorGhoneim, Mohamed T.
dc.contributor.authorRojas, Jhonathan Prieto
dc.contributor.authorHussain, Aftab M.
dc.contributor.authorHussain, Muhammad Mustafa
dc.date.accessioned2015-08-03T11:35:36Z
dc.date.available2015-08-03T11:35:36Z
dc.date.issued2013-11-20
dc.identifier.citationGhoneim, M. T., Rojas, J. P., Hussain, A. M., & Hussain, M. M. (2013). Additive advantage in characteristics of MIMCAPs on flexible silicon (100) fabric with release-first process. Physica Status Solidi (RRL) - Rapid Research Letters, 8(2), 163–166. doi:10.1002/pssr.201308209
dc.identifier.issn18626254
dc.identifier.doi10.1002/pssr.201308209
dc.identifier.urihttp://hdl.handle.net/10754/563092
dc.description.abstractWe report the inherent increase in capacitance per unit planar area of state-of-the art high-κ integrated metal/insulator/metal capacitors (MIMCAPs) fabricated on flexible silicon fabric with release-first process. We methodically study and show that our approach to transform bulk silicon (100) into a flexible fabric adds an inherent advantage of enabling higher integration density dynamic random access memory (DRAM) on the same chip area. Our approach is to release an ultra-thin silicon (100) fabric (25 μm thick) from the bulk silicon wafer, then build MIMCAPs using sputtered aluminium electrodes and successive atomic layer depositions (ALD) without break-ing the vacuum of a high-κ aluminium oxide sandwiched between two tantalum nitride layers. This result shows that we can obtain flexible electronics on silicon without sacrificing the high density integration aspects and also utilize the non-planar geometry associated with fabrication process to obtain a higher integration density compared to bulk silicon integration due to an increased normalized capacitance per unit planar area. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
dc.description.sponsorshipWe would like to thank the KAUST OCRF Competitive Research Grant: CRG-1-2012-HUS-008.
dc.publisherWiley
dc.subjectCapacitance
dc.subjectFlexible electronics
dc.subjectMetal-insulator-metal capacitors
dc.subjectSilicon
dc.titleAdditive advantage in characteristics of MIMCAPs on flexible silicon (100) fabric with release-first process
dc.typeArticle
dc.contributor.departmentIntegrated Nanotechnology Lab
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.identifier.journalphysica status solidi (RRL) - Rapid Research Letters
kaust.personGhoneim, Mohamed T.
kaust.personRojas, Jhonathan Prieto
kaust.personHussain, Aftab M.
kaust.personHussain, Muhammad Mustafa
kaust.grant.numberCRG-1-2012-HUS-008
kaust.acknowledged.supportUnitKAUST OCRF Competitive Research
dc.date.published-online2013-11-20
dc.date.published-print2014-02


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