Optimized fabrication protocols of microfluidic devices for X-ray analysis

Abstract
Microfluidics combined with X-ray scattering techniques allows probing conformational changes or assembly processes of biological materials. Our aim was to develop a highly X-ray transparent microfluidic cell for detecting small variations of X-ray scattering involved in such processes. We describe the fabrication of a polyimide microfluidic device based on a simple, reliable and inexpensive lamination process. The implemented microstructured features result in windows with optimized X-ray transmission. The microfluidic device was characterized by X-ray microbeam scattering at the ID13 beamline of the European Synchrotron Radiation Facility. © 2014 Elsevier B.V. All rights reserved.

Citation
Catalano, R., Perozziello, G., Simone, G., Candeloro, P., Gentile, F., Coluccio, M. L., … Di Fabrizio, E. (2014). Optimized fabrication protocols of microfluidic devices for X-ray analysis. Microelectronic Engineering, 124, 13–16. doi:10.1016/j.mee.2014.04.016

Acknowledgements
This work was partially supported by the European project EUROMBR (grant agreement n. 608104), the project for Young Researchers financed from the Italian Ministry of Health (CUP J65C13001350001, project n. GR-2010-2311677) and the project FIRB "ReteNazionale di Ricerca sulle Nanoscienze ItalNanoNet" (cod. RBPR05JH2P_010, CUP B41J09000110005) granted to the nanotechnology laboratory of the Department of Experimental Medicine of the University of Catanzaro.

Publisher
Elsevier BV

Journal
Microelectronic Engineering

DOI
10.1016/j.mee.2014.04.016

Permanent link to this record