Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
| dc.contributor.author | Zhao, Chao | |
| dc.contributor.author | Hedhili, Mohamed N. | |
| dc.contributor.author | Li, Jingqi | |
| dc.contributor.author | Wang, Qingxiao | |
| dc.contributor.author | Yang, Yang | |
| dc.contributor.author | Chen, Long | |
| dc.contributor.author | LI, LIANG | |
| dc.date.accessioned | 2015-08-03T11:16:10Z | |
| dc.date.available | 2015-08-03T11:16:10Z | |
| dc.date.issued | 2013-09 | |
| dc.identifier.citation | Zhao, C., Hedhili, M. N., Li, J., Wang, Q., Yang, Y., Chen, L., & Li, L. (2013). Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition. Thin Solid Films, 542, 38–44. doi:10.1016/j.tsf.2013.06.010 | |
| dc.identifier.issn | 00406090 | |
| dc.identifier.doi | 10.1016/j.tsf.2013.06.010 | |
| dc.identifier.uri | http://hdl.handle.net/10754/562935 | |
| dc.description.abstract | The growth of TiO2 films by plasma enhanced atomic layer deposition using Star-Ti as a precursor has been systematically studied. The conversion from amorphous to crystalline TiO2 was observed either during high temperature growth or annealing process of the films. The refractive index and bandgap of TiO2 films changed with the growth and annealing temperatures. The optimization of the annealing conditions for TiO2 films was also done by morphology and density studies. © 2013 Elsevier B.V. All rights reserved. | |
| dc.publisher | Elsevier BV | |
| dc.subject | Atomic force microscopy | |
| dc.subject | Atomic layer deposition | |
| dc.subject | Ellipsometer | |
| dc.subject | Raman spectroscopy | |
| dc.subject | TiO2 film | |
| dc.subject | X-ray diffraction | |
| dc.title | Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition | |
| dc.type | Article | |
| dc.contributor.department | Imaging and Characterization Core Lab | |
| dc.contributor.department | Advanced Nanofabrication, Imaging and Characterization Core Lab | |
| dc.contributor.department | Core Labs | |
| dc.identifier.journal | Thin Solid Films | |
| kaust.person | Zhao, Chao | |
| kaust.person | Hedhili, Mohamed N. | |
| kaust.person | Li, Jingqi | |
| kaust.person | Wang, Qingxiao | |
| kaust.person | Yang, Yang | |
| kaust.person | Chen, Long | |
| kaust.person | LI, LIANG |