Flexible and semi-transparent thermoelectric energy harvesters from low cost bulk silicon (100)

Type
Article
Authors
Sevilla, Galo T. cc
Inayat, Salman Bin
Rojas, Jhonathan Prieto cc
Hussain, Aftab M. cc
Hussain, Muhammad Mustafa cc
KAUST Department
Integrated Nanotechnology Lab
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Date
2013-07-09

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Abstract
Flexible and semi-transparent high performance thermoelectric energy harvesters are fabricated on low cost bulk mono-crystalline silicon (100) wafers. The released silicon is only 3.6% as thick as bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. This generic batch processing is a pragmatic way of transforming traditional silicon circuitry for extremely deformable high-performance integrated electronics. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Sponsors
The authors acknowledge financial support under Baseline Research Funding from King Abdullah University of Science and Technology, the Provost Award (to GTS and AH) and the GRP Collaborative Fellow Award (to SI) (GRP-CF-2011-01-S). We also thank Kelly Rader for proof reading the manuscript.
Publisher
Wiley-Blackwell
Journal
Small
ISSN
16136810
DOI
10.1002/smll.201301025
PubMed ID
23836675
Handle URI
http://hdl.handle.net/10754/562858
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