Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings

Type
Article

Authors
Granet, Gérard
Melezhik, Petr N.
Sirenko, Kostyantyn
Yashina, Nataliya P.

KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Online Publication Date
2013-02-18

Print Publication Date
2013-03-01

Date
2013-02-18

Abstract
This paper focuses on scatterometry problems arising in lithography production of periodic gratings. Namely, the paper introduces a theoretical and numerical-modeling-oriented approach to scatterometry problems and discusses its capabilities. The approach allows for reliable detection of deviations in gratings' critical dimensions (CDs) during the manufacturing process. The core of the approach is the one-to-one correspondence between the electromagnetic (EM) characteristics and the geometric/material properties of gratings. The approach is based on highly accurate solutions of initial boundary-value problems describing EM waves' interaction on periodic gratings. The advantage of the approach is the ability to perform simultaneously and interactively both in frequency and time domains under conditions of possible resonant scattering of EM waves by infinite or finite gratings. This allows a detection of CDs for a wide range of gratings, and, thus is beneficial for the applied scatterometry. (C) 2013 Optical Society of America

Citation
Granet, G., Melezhik, P., Sirenko, K., & Yashina, N. (2013). Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings. Journal of the Optical Society of America A, 30(3), 427. doi:10.1364/josaa.30.000427

Publisher
The Optical Society

Journal
Journal of the Optical Society of America A

DOI
10.1364/josaa.30.000427

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