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    Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering

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    Type
    Article
    Authors
    Yue, Weisheng
    Wang, Zhihong
    Yang, Yang
    Chen, Longqing
    Syed, Ahad A.
    Wong, Ka Chun
    Wang, Xianbin
    KAUST Department
    Imaging and Characterization Core Lab
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Computer Science Program
    Advanced Nanofabrication, Imaging and Characterization Core Lab
    Core Labs
    Date
    2012-10-26
    Online Publication Date
    2012-10-26
    Print Publication Date
    2012-12-01
    Permanent link to this record
    http://hdl.handle.net/10754/562376
    
    Metadata
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    Abstract
    The fabrication of nanostructured substrates with precisely controlled geometries and arrangements plays an important role in studies of surface-enhanced Raman scattering (SERS). Here, we present two processes based on electron-beam lithography to fabricate gold nanostructures for SERS. One process involves making use of metal lift-off and the other involves the use of the plasma etching. These two processes allow the successful fabrication of gold nanostructures with various kinds of geometrical shapes and different periodic arrangements. 4-mercaptopyridine (4-MPy) and Rhodamine 6G (R6G) molecules are used to probe SERS signals on the nanostructures. The SERS investigations on the nanostructured substrates demonstrate that the gold nanostructured substrates have resulted in large SERS enhancement, which is highly dependent on the geometrical shapes and arrangements of the gold nanostructures. © 2012 IOP Publishing Ltd.
    Citation
    Yue, W., Wang, Z., Yang, Y., Chen, L., Syed, A., Wong, K., & Wang, X. (2012). Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering. Journal of Micromechanics and Microengineering, 22(12), 125007. doi:10.1088/0960-1317/22/12/125007
    Publisher
    IOP Publishing
    Journal
    Journal of Micromechanics and Microengineering
    DOI
    10.1088/0960-1317/22/12/125007
    ae974a485f413a2113503eed53cd6c53
    10.1088/0960-1317/22/12/125007
    Scopus Count
    Collections
    Articles; Imaging and Characterization Core Lab; Computer Science Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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