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dc.contributor.authorShen, Zhiyuan
dc.contributor.authorOlfatnia, Mohammad
dc.contributor.authorMiao, Jianmin
dc.contributor.authorWang, Zhihong
dc.date.accessioned2015-08-03T09:45:57Z
dc.date.available2015-08-03T09:45:57Z
dc.date.issued2012-04-03
dc.identifier.citationShen, Z., Olfatnia, M., Miao, J., & Wang, Z. (2012). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. Smart Materials and Structures, 21(5), 055001. doi:10.1088/0964-1726/21/5/055001
dc.identifier.issn09641726
dc.identifier.doi10.1088/0964-1726/21/5/055001
dc.identifier.urihttp://hdl.handle.net/10754/562150
dc.description.abstractThis paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.
dc.publisherIOP Publishing
dc.titleDisplacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
dc.typeArticle
dc.contributor.departmentImaging and Characterization Core Lab
dc.contributor.departmentAdvanced Nanofabrication, Imaging and Characterization Core Lab
dc.contributor.departmentCore Labs
dc.identifier.journalSmart Materials and Structures
dc.contributor.institutionSchool of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
kaust.personWang, Zhihong
dc.date.published-online2012-04-03
dc.date.published-print2012-05-01


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