Type
Conference PaperAuthors
Ramadan, Khaled S.Foulds, Ian G.
KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Electromechanical Microsystems & Polymer Integration Research Lab (EMPIRe)
Physical Science and Engineering (PSE) Division
Date
2011-11Permanent link to this record
http://hdl.handle.net/10754/561913
Metadata
Show full item recordAbstract
A 1500μm × 1500μm × 150μm out-of-plane, gap closing, electrostatic energy harvester is designed and fabricated to harvest low-frequency ambient vibrations. SU-8 is used to fabricate the proof mass (1200μm × 1200μm × 150μm) and the 5 m springs. Different harvesters were designed to harvest at 50, 75 and 110 Hz. At 110 Hz, Simulations show that with an input vibration of 10 μm amplitude at the frequency of resonance of the structure, the energy harvester should generate an average output power density of 0.032μW/mm3. This is the most area-efficient low-frequency electrostatic harvester to-date. © 2011 IEEE.Citation
Ramadan, K., & Foulds, I. G. (2011). Fabrication of SU-8 low frequency electrostatic energy harvester. 2011 International Conference on Energy Aware Computing. doi:10.1109/iceac.2011.6136689Conference/Event name
2011 International Conference on Energy Aware Computing, ICEAC 2011ISBN
9781467304658ae974a485f413a2113503eed53cd6c53
10.1109/ICEAC.2011.6136689