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    Design and finite element method analysis of laterally actuated multi-value nano electromechanical switches

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    Type
    Article
    Authors
    Kloub, Hussam
    Smith, Casey
    Hussain, Muhammad Mustafa cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Integrated Nanotechnology Lab
    Physical Science and Engineering (PSE) Division
    Date
    2011-09-20
    Permanent link to this record
    http://hdl.handle.net/10754/561864
    
    Metadata
    Show full item record
    Abstract
    We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders this design competitive with complementary metal oxide semiconductor and superior to conventional nano-electromechanical switches in terms of functionality per device footprint. The structural architecture of the newly designed switch consists of a pinned flexural beam structure which allows low strain lateral actuation for enhanced mechanical integrity. Reliable control of on-state electrical current density is achieved through the use of metal-metal contacts, true parallel beam deflection, and lithographically defined contact area to prevent possible device welding. Dynamic response as a function of device dimensions numerically investigated using ANSYS and MatLab Simulink. © 2011 The Japan Society of Applied Physics.
    Citation
    Kloub, H. A., Smith, C. E., & Hussain, M. M. (2011). Design and Finite Element Method Analysis of Laterally Actuated Multi-Value Nano Electromechanical Switches. Japanese Journal of Applied Physics, 50(9), 094301. doi:10.1143/jjap.50.094301
    Publisher
    IOP Publishing
    Journal
    Japanese Journal of Applied Physics
    DOI
    10.1143/JJAP.50.094301
    ae974a485f413a2113503eed53cd6c53
    10.1143/JJAP.50.094301
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Integrated Nanotechnology Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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