Design and finite element method analysis of laterally actuated multi-value nano electromechanical switches

Abstract
We report on the design and modeling of novel nano electromechanical switches suitable for implementing reset/set flip-flops, AND, NOR, and XNOR Boolean functions. Multiple logic operations can be implemented using only one switching action enabling parallel data processing; a feature that renders this design competitive with complementary metal oxide semiconductor and superior to conventional nano-electromechanical switches in terms of functionality per device footprint. The structural architecture of the newly designed switch consists of a pinned flexural beam structure which allows low strain lateral actuation for enhanced mechanical integrity. Reliable control of on-state electrical current density is achieved through the use of metal-metal contacts, true parallel beam deflection, and lithographically defined contact area to prevent possible device welding. Dynamic response as a function of device dimensions numerically investigated using ANSYS and MatLab Simulink. © 2011 The Japan Society of Applied Physics.

Citation
Kloub, H. A., Smith, C. E., & Hussain, M. M. (2011). Design and Finite Element Method Analysis of Laterally Actuated Multi-Value Nano Electromechanical Switches. Japanese Journal of Applied Physics, 50(9), 094301. doi:10.1143/jjap.50.094301

Publisher
IOP Publishing

Journal
Japanese Journal of Applied Physics

DOI
10.1143/JJAP.50.094301

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