Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers
AuthorsFuentes-Fernandez, E. M A
Baldenegro-Pérez, Leonardo Aurelio
Quevedo-López, Manuel Angel Quevedo
Gnade, Bruce E.
Alshareef, Husam N.
KAUST DepartmentMaterials Science and Engineering Program
Physical Sciences and Engineering (PSE) Division
Functional Nanomaterials and Devices Research Group
Permanent link to this recordhttp://hdl.handle.net/10754/561855
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AbstractLead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.
SponsorsThe authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.