MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range
KAUST DepartmentElectrical Engineering Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
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AbstractThis paper, the first in a series of two, presents a paradigm shift in the design of MEMS parallel plate PolyMUMPS variable capacitance devices by proposing two structures that utilize the substrate and are able to provide predetermined, customizable, tuning ranges and/or ratios. The proposed structures can provide theoretical tuning ranges anywhere from 4.9 to 35 and from 3.4 to 26 respectively with a simple, yet effective, layout modification as opposed to the previously reported devices where the tuning range is fixed and cannot be varied. Theoretical analysis is carried out and verified with measurements of fabricated devices. The first proposed device possessed initially a tuning range of 4.4. Two variations of the structure having tuning ranges of 3 and 3.4, all at 1 GHz, were also successfully developed and tested. The second proposed variable capacitance device behaved as a switch. © 2010 IOP Publishing Ltd.
SponsorsThe authors would like to thank Dr T Hubbard for his valuable discussions and advice. This work was supported by grants from the Natural Sciences and Engineering Research Council of Canada (NSERC), by the Canadian Network of Centers of Excellence in Microelectronics (MICRONET) and by the Canadian Microelectronic Corporation (CMC Microsystems).