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dc.contributor.authorHussain, Muhammad Mustafa
dc.contributor.authorSmith, Casey Eben
dc.contributor.authorHarris, Harlan Rusty
dc.contributor.authorYoung, Chadwin
dc.contributor.authorTseng, Hsinghuang
dc.contributor.authorJammy, Rajarao
dc.date.accessioned2015-08-02T09:11:46Z
dc.date.available2015-08-02T09:11:46Z
dc.date.issued2010-03
dc.identifier.issn00189383
dc.identifier.doi10.1109/TED.2009.2039097
dc.identifier.urihttp://hdl.handle.net/10754/561454
dc.description.abstractGate-first integration of tunable work function metal gates of different thicknesses (320 nm) into high-k/metal gates CMOS FinFETs was demonstrated to achieve multiple threshold voltages (VTh) for 32-nm technology and beyond logic, memory, input/output, and system-on-a-chip applications. The fabricated devices showed excellent short-channel effect immunity (drain-induced barrier lowering ∼ 40 mV/V), nearly symmetric VTh, low T inv(∼ 1.4 nm), and high Ion(∼780μAμm) for N/PMOS without any intentional strain enhancement. © 2006 IEEE.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.subjectFinFET
dc.subjectGate-first integration
dc.subjectHigh- k/metal gates stack
dc.subjectTunable work function (TWF)
dc.titleGate-first integration of tunable work function metal gates of different thicknesses into high-k metal gates CMOS FinFETs for multi- VTh engineering
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentIntegrated Nanotechnology Lab
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalIEEE Transactions on Electron Devices
dc.contributor.institutionSEMATECH, Inc., Austin, TX 78741, United States
dc.contributor.institutionDepartment of Electrical and Computer Engineering, Texas A and M University, College Station, TX 77843, United States
dc.contributor.institutionTexas State University, San Marcos, TX 78666, United States
kaust.personHussain, Muhammad Mustafa


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