Focused-ion beam patterning of organolead trihalide perovskite for subwavelength grating nanophotonic applications
AuthorsAlias, Mohd Sharizal
Saidaminov, Makhsud I.
Diallo, Elhadj Marwane
Ng, Tien Khee
Ooi, Boon S.
KAUST DepartmentPhotonics Laboratory
KAUST Solar Center (KSC)
Advanced Nanofabrication and Thin Film Core Lab
Imaging and Characterization Core Lab
Physical Sciences and Engineering (PSE) Division
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
MetadataShow full item record
AbstractThe coherent amplified spontaneous emission and high photoluminescence quantum efficiency of organolead trihalide perovskite have led to research interest in this material for use in photonic devices. In this paper, the authors present a focused-ion beam patterning strategy for methylammonium lead tribromide (MAPbBr3) perovskite crystal for subwavelength grating nanophotonic applications. The essential parameters for milling, such as the number of scan passes, dwell time, ion dose, ion current, ion incident angle, and gas-assisted etching, were experimentally evaluated to determine the sputtering yield of the perovskite. Based on our patterning conditions, the authors observed that the sputtering yield ranged from 0.0302 to 0.0719 μm3/pC for the MAPbBr3 perovskite crystal. Using XeF2 for the focused-ion beam gas-assisted etching, the authors determined that the etching rate was reduced to between 0.40 and 0.97, depending on the ion dose, compared with milling with ions only. Using the optimized patterning parameters, the authors patterned binary and circular subwavelength grating reflectors on the MAPbBr3 perovskite crystal using the focused-ion beam technique. Based on the computed grating structure with around 97% reflectivity, all of the grating dimensions (period, duty cycle, and grating thickness) were patterned with nanoscale precision (>±3 nm), high contrast, and excellent uniformity. Our results provide a platform for utilizing the focused-ion beam technique for fast prototyping of photonic nanostructures or nanodevices on organolead trihalide perovskite.
CitationFocused-ion beam patterning of organolead trihalide perovskite for subwavelength grating nanophotonic applications 2015, 33 (5):051207 Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
SponsorsThe authors gratefully acknowledge the funding support from KAUST and King Abdulaziz City for Science and Technology TIC (Technology Innovation Center) for Solid-State Lighting at KAUST.
PublisherAmerican Vacuum Society
JournalJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena