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dc.contributor.advisorYounis, Mohammad I.
dc.contributor.authorAl Hennawi, Qais M.
dc.date.accessioned2015-05-21T07:55:01Z
dc.date.available2015-05-21T07:55:01Z
dc.date.issued2015-05
dc.identifier.doi10.25781/KAUST-712H7
dc.identifier.urihttp://hdl.handle.net/10754/554394
dc.description.abstractIn this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.
dc.language.isoen
dc.subjectMEMS
dc.subjectMicroarch
dc.subjectSnap-Through
dc.subjectDynamics
dc.subjectFrequencies
dc.titleNonlinear Dynamics of Electrostatically Actuated MEMS Arches
dc.typeThesis
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
thesis.degree.grantorKing Abdullah University of Science and Technology
dc.contributor.committeememberThoroddsen, Sigurdur T
dc.contributor.committeememberLaleg-Kirati, Taous-Meriem
thesis.degree.disciplineMechanical Engineering
thesis.degree.nameMaster of Science
refterms.dateFOA2016-05-20T00:00:00Z


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