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    Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems

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    Type
    Article
    Authors
    Alfadhel, Ahmed cc
    Gianchandani, Y.
    Kosel, Jürgen cc
    KAUST Department
    Electrical Engineering Program
    Physical Science and Engineering (PSE) Division
    Sensing, Magnetism and Microsystems Lab
    Date
    2012-03-10
    Online Publication Date
    2012-03-10
    Print Publication Date
    2012-04
    Permanent link to this record
    http://hdl.handle.net/10754/552838
    
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    Abstract
    This paper reports the development of integrated micro-sensors consisting of 1 -µm-thick magnetostrictive cantilevers or bridges with 500 µm in length and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo, and the magnetic properties are enhanced by field annealing, resulting in a coercivity of 2.4 Oe. In operation, an alternating current applied to the interrogation elements magnetizes the magnetostrictive structures. The longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The magnetostrictive micro-beams provide high resonant frequencies—2.95 MHz for the cantilever and 5.46 MHz for the bridge—which can be exploited to develop sensors of high sensitivity.
    Citation
    Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems 2012, 111 (7):07E515 Journal of Applied Physics
    Publisher
    AIP Publishing
    Journal
    Journal of Applied Physics
    DOI
    10.1063/1.3679016
    Additional Links
    http://scitation.aip.org/content/aip/journal/jap/111/7/10.1063/1.3679016
    ae974a485f413a2113503eed53cd6c53
    10.1063/1.3679016
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Sensing, Magnetism and Microsystems Lab

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