Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems
Type
ArticleKAUST Department
Electrical Engineering ProgramPhysical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab
Date
2012-03-10Online Publication Date
2012-03-10Print Publication Date
2012-04Permanent link to this record
http://hdl.handle.net/10754/552838
Metadata
Show full item recordAbstract
This paper reports the development of integrated micro-sensors consisting of 1 -µm-thick magnetostrictive cantilevers or bridges with 500 µm in length and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo, and the magnetic properties are enhanced by field annealing, resulting in a coercivity of 2.4 Oe. In operation, an alternating current applied to the interrogation elements magnetizes the magnetostrictive structures. The longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The magnetostrictive micro-beams provide high resonant frequencies—2.95 MHz for the cantilever and 5.46 MHz for the bridge—which can be exploited to develop sensors of high sensitivity.Citation
Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems 2012, 111 (7):07E515 Journal of Applied PhysicsPublisher
AIP PublishingJournal
Journal of Applied Physicsae974a485f413a2113503eed53cd6c53
10.1063/1.3679016