Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips

Abstract

A novel microfluidicpressuresensor which can be fully integrated into polydimethylsiloxane(PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 μm thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0–100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations.